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    电子芯片超纯水设备

    电子芯片超纯水设备

     详情说明


    电子芯片超纯水设备概述:


    电子芯片超纯水对TOC、DO、SIO2、Particulate的控制严格,达到PPb级,产水水质要求在18.2MΩ*cm(25℃)以上。


    电子芯片超纯水设备工艺流程:

    ①反渗透纯水设备
    RO反渗透膜的工作原理是对水施加一定的压力,使水分子和离子态的矿物质元素通过一层反渗透膜,而溶解在水中的绝大部分无机盐(包括重金属)、有机物以及细菌、病毒等无法透过反渗透膜,从而透过的纯水和无法透过的浓缩水严格的分开;

    反渗透膜上的孔径只有0.0001um,而病毒的直径一般有0.02-0.4um,普通细菌的直径有0.4-1um。 反渗透纯水机的正常工作有赖于一定的压力,这个压力大于渗透膜的渗透压,一般是2.8公斤/平方厘米。

    在水压或水压不稳定的地区,我们建议您一定要购买有前段增压泵的反渗透纯水系统,它的工作压力可达0.3-0.6Mpa,不受自来水压限制,制水效率高,速度快、排浓缩水少。

    反渗透技术是有效的除盐技术,一级反渗透设备出水电阻率一般在0.05-0.5MΩ.CM.此纯水系统产水品质稳定,是目前比较通用的纯水生产设备,生产品质基本满足FPC/PCB生产需求。


    ②EDI电除盐超纯水系统
    连续电除盐(EDI, Electro deionization或CDI, continuous electrode ionization),是利用混和离子交换树脂吸附给水中的阴阳离子,同时这些被吸附的离子又在直流电压的作用下,分别透过阴阳离子交换膜而被除去的过程。

    这一过程离子交换树脂是电连续再生的,因此不需要使用酸和碱对之再生。

    这种新技术可以替代传统的离子交换装置,生产出高达18MΩ.CM的超纯水。整个工艺流程前面的部分和常规的水处理工艺没有很大区别,一般是先经过预处理,然后加药杀毒,再经过RO反渗透系统,再使用EDI设备制取超纯水。


    电子芯片超纯水设备优点:

    半导体芯片用水主要在于前端晶棒硅切片冷却用水,基板晶圆片检测清洗用水,中段晶圆片溅镀、曝光、电镀、光刻、腐蚀等工艺清洗,后段检测封装清洗。LED芯片主要是前段在MOCVD外延片生长用水,中段主要在曝光、显影、去光阻清洗用水,后段检测封装用水。同时,半导体行业对TOC的要求较高。


    电子芯片超纯水设备特点介绍:

    由于超纯水设备的工艺是根据不同的入水水质和出水要求而设计的,针对不同的原水水质特点而设计超纯水设备方案才是经济有效的方案,同时也是出水水质长期稳定达到要求的保证。超纯水设备由于用途不一样,会有不同的制造流程,或有的把几种工艺结合起来让水质达到预期的效果,按类别可大至分为以下几种,比较常用的预处理系统,反渗透系统, EDI电除盐超纯水系统,精处理系统等。


    EDI电除盐超纯水系统原理及特点:

    (1)出水水质具有稳定性
    (2)能连续生产出符合用户要求的超纯水
    (3)模块化生产,并可实现全自动控制
    (4)不需酸碱再生,无污水排放
    (5)不会因再生而停机
    (6)无需再生设备和化学药品储运
    (7)设备结构紧凑,占地面积小
    (8)运行成本和维修成本低
    (9)运行操作简单,劳动强度低



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